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Sputtering Machine
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Advanced semiconductor packaging solutions
Sputtering Machine
It is mainly used for sputtering of ultra‑fine circuits on semiconductor substrates, interposers, TGV and ABF fine‑line structures.
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Product Advantages
Product Advantages:
- Special fixture transport
- High‑efficiency production for double‑sided sputtering
- Servo‑controlled precision low‑speed bidirectional transmission system
- Ti coating thickness: 50‑400 nm; Cu coating thickness: 200‑1000 nm
- Custom multi‑target design, independent operation control, matched with sputtering rates for different metals